Introduction from the current domestic and foreign research situation, in the existing technical level is also difficult to achieve a diamond film of the article in large quantities, the industrialization preparation. And even small quantities of the preparation, there is also a long production cycle, the manufacturing cost is relatively high shortcomings.

Since the diamond itself has good physical and chemical properties, in electronics, chemical industry, machinery for diamond products demand also Ft decreasing pressing. Abroad is currently dedicated to the study of the Ic Diamond cooling system, titanium electrode, the diamond surface treatment and the cemented carbide tool coating technology. Industry-leading U.S. sp3 company the use of hot wire CVD (hot filament CVD reactors)equipment to carry out these popular applications, the And in 2006, with the United States CPS company alliances joint solution A1SiC ceramic in high temperature applications in the presence of a series of puzzles in order to meet the electronic packaging market, huge demand.

Therefore, the promotion of CVD Diamond film product development the application of a draw on the road is through the development of low power consumption, small volume, stable performance and has a larger deposition area of the hot filament CVD set Fund...